ATLEX-300-FBG/ATLEX-500-FBG準分子雷射特點：
- Soft corona preionization
- HV-solid state pulser
- Laser head volume <>
- TMC (Total-Metal-Ceramic) Vessel
- Integrated vacuum pump & halogen filter
- Air Cooled / Optional Liquid Cooled, active thermal management
- RS-485, RS232, USB and fiber optic Interface for system integration
- Flushable optics holder
- Energy stabilization mode
- Meets European CE-standard
- RoHS compliance
| ATLEX-300-FBG/ATLEX-500-FBG Specifications | |||
| Gas Medium | ArF | KrF | Units |
| Wavelength | 193 | 248 | nm |
| High Voltage Switching Technique | Solid State Switch | ||
| Max. Pulse Energy 1 | 10 | 15 | mJ |
| Max. Average Power | 2.4 / 4.0 | 4.0 / 6.5 | W |
| Spatial Coherence (Vertical Beam Direction) | >300 | >300 | µm |
| Max. Rep Rate | 300 / 500 | Hz | |
| Pulse Duration 2 | 5 – 8 | ns | |
| Beam Dimensions 2 (V x H) | 4 x 6 | mm | |
| Beam Divergence 2 (V x H) | 1 x 2 | mrad | |
| Energy Stability (standard deviation) | <> | % | |
| Dimensions (LxWxH) click here for details | 540 x 470 x 370 | mm | |
| Weight | 60 | kg | |
| Cooling | Cooling Air / Optional Liquid | ||
| Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz | ||
