详细说明
【参数介绍】
1. 结构简单稳固 Strong and simple structure
_ 铸铁机身 Cast iron body
_ 结构设计精良 Superior designed construction
_ 减少晶片表面损伤及翘曲 Low surface damage and wafer warpage
2. 自动尺寸控制系统 Automatic size measuring system
3. 自动修整系统 Automatic dressing system
4. 全自动上下料系统 Automatic Loading/Unloading, Auto Handling System
5. 自动清洗、干燥系统 Automatic cleaning & dry system
6. 可编程操作系统 Programmable operating system
_ 可储存20套加工程序，简单操作
Saving max. 20 sets work programs for easy operation
_ 易于操控 Easy to control and maintenance
应用领域 Applications
硅片，碳化硅片，蓝宝石晶圆，金属，陶瓷
碳，玻璃，塑料，复合材料
Silicon Wafer, SiC Wafer, Sapphire, Metals, Ceramics, Carbons, Glasses, Plastics, Composites
型号Model | HRG-150 | VRG-250F | VRG-300F | VRG-500 | |
工件尺寸Grinding wheel speed | 3000 rpm | 3000 rpm | 4000 rpm | 4000 rpm | |
工作轴Working shaft | 0.2kW 260rpm | 0.75kW 260rpm | 1.5kW 260rpm | 2.2kW 260rpm | |
工件尺寸Workpiece sizes | mm | Ø150 | Ø250 | Ø300 | Ø500 |
mm | 70 | 100 | 100 | 200 | |
砂轮进给Grinding speed | mm/min | 0.0001~1 | 0.0001~1 | 0.0001~1 | 0.0001~1 |
分辨率Resolution | mm | 0.0001 | 0.0001 | 0.0001 | 0.0001 |
定位精度Positioning precision | mm | ±0.001 | ±0.002 | ||
重复定位精度Repeat positioning precision | mm | ±0.001 | ±0.001 | ±0.001 | ±0.001 |
自动尺寸检测Automatic size measuring | mm | N/A | Option | Option | Option |
自动修整Automatic dressing | mm | Option | Option | Option | Option |
尺寸Dimensions (L*W*H) | mm |
| 1100x950x1970 | 1200x1050x1970 | 1300x1400x2100 |
重量Weight | Kg | 1400 | 1450 | 1750 | 2000 |
