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北京锐洁机器人科技有限公司>>Aligner（校准器）>>SAL3000HV晶圆校准器不受晶圆材质（新产品【SAL3000HV系列】全自动调整功能对应版本）

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更新时间：2022-12-16 10:49:08浏览次数：289

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联系方式：王先生查看联系方式

产品简介

适用于2, 3寸, 100-300 mm晶圆, 可适用于多种晶圆的新型Aligner。全自动调整功能软件【JEL ALIGN TOOL】能够完成多种不同用途晶圆的校准功能。

详细介绍

特点

    JEL研发的可对应多种类型晶圆的新型Aligner【SAL3000HV系列】全自动对应版本。
    2016年12月14日之后出厂的校准器产品都配有校准工具软件。
    *详细情报 【JEL ALIGN TOOL】软件.

    使用了新技术的可用于多种材质晶圆的新产品

  • 可适用于硅片，带BG胶带（乳白色）的硅片，透明，半透明晶圆等不同材质晶圆的位置校准
  • 使用自主研发的图像识别传感器，采用了控制器和电机驱动器集成到设备本体内部的一体化设计
  • 可以根据晶圆尺寸，材质更改Spindle的直径，形状和材质可以使用伯努利吸附方式
  • 控制方式：串口RS232C或者并口光学I/O口
  • 不符合SEMI规格的缺口，缺边形状也可以提供定制设计
  • 能够为Spindle增加Z轴以满足对晶圆进行升降的需求
应用设备实例

PE-CVD设备；AOI设备

规格
被搬运物 SEMI规格 晶圆(透明, 半透明, 硅片晶圆)
(其他可根据特殊晶圆的形状，材质为客户提供灵活的定制设计)
2, 3寸, 100-150 mm (SAL3262HV)
100-200 mm (SAL3482HV)
200-300 mm (SAL38C3HV)
位置精度 晶圆中心：±0.1 mm以内
晶圆缺边（缺口）：±0.1度以内
位置确定所需时间 3秒（不包括晶圆的取放时间）
传感器 LED灯照明+图像识别传感器的方式对晶圆边缘进行检测
位置校正范围 半径4mm以内
晶圆吸附方式 真空吸附式
洁净度 ISO标准 Class 2(驱动结构内部独立排气条件下)
质量 大约10 kg
厂务 电源：DC24V±10% 3A 真空：-53 kPa以上

测试机型：SAL3000HV系列

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