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详细介绍
Next generation micro- and nanotechnology devices such as micro-acoustic filters, RF-MEMS and ultrasonic transducers involve high frequency mechanical vibration and wave propagation approaching GHz frequencies. For microscopic devices operating at these frequencies only sophisticated optical techniques can provide the spatial resolution, zero mass loading and vibration sensitivity required for proper characterization.
UHF-120 Ultra High Frequency Vibrometer captures real-time, out-of-plane motions of micro devices with picometer sensitivity and a measurement bandwidth of up to 2.4 GHz. Options provide for either a manual point-by-point system (VibSoft) or an automated scanning system (PSV Soft) capturing and analyzing deflection shapes.
Technical data | ||||||
Metrological specifications | ||||||
Max. vibration frequency | 600 MHz | 1.2 GHz (optional) | 2.4 GHz (optional) | |||
Maximum measurement time | 3.906 ms | 3.906 ms | 1.963 ms | |||
Max. sample rate | 40 GSa/s | |||||
Amplitude resolution of UHF-A-120 | 8 bit | |||||
Displacement-amplitude resolution | 1.5 pm at 2.5 kHz resolution bandwidth (corresponds to 30 fm/√(Hz)) | |||||
Max. number of FFT lines | 2,343,750 | 4,687,500 | 2,343,750 | |||
Best frequency resolution | 256 Hz | 256 Hz | 512 Hz | |||
Number of reference channels | 1 | |||||
Optical specifications | ||||||
Laser type | solid state | |||||
Laser wavelength | 532 nm, visible green beam | |||||
Laser spot diameter | < 2.5 µm (1/e²) 1 | |||||
Laser output | < 5 mW 2 | |||||
Laser protection class | Class 3R | |||||
Camera type | 1/4" CCD color board camera | |||||
Active pixels (H x V) | 510 x 492 | |||||
Illumination | integrated, bright-field | |||||
Objective | 20x microscope objective 3 | |||||
Field of view | 0.71 mm x 0.55 mm (aprox.) | |||||
Working distance | 20 mm | |||||
UHF-120 system configurations | ||||||
UHF-120 | UHF-120-SV | |||||
Vibrometer system | UHF-I-120 Sensor Head | |||||
Data acquisition & | UHF-A-121 LeCroy Oscilloscope and Digitizer | |||||
Software | VibSoft system software | PSV system software | ||||
XY-Stage | manual stage (optional) | A-PST-200P XY Precision Positioning Stage | ||||
Accessories | A-CAB-BAS System Cabinet for 19" electronic components | |||||
UHF-I-120 Sensor Head | ||||||
Dimensions [W x D x H] | 158 x 129 x 376 mm | |||||
Weight | 11.4 kg | |||||
Specification of motion axes | ||||||
XY-Stage | A-SPK-0002 | A-PST-200P XY | ||||
Dimensions [W x D x H] | 161 x 158 x 116 mm | 310 x 310 x 135 mm | ||||
Weight | 1.8 kg | 21.6 kg | ||||
Lateral travel range | 13 mm x 13 mm, manually actuated | 200 mm x 200 mm, motorized | ||||
Repeatability (bi-directional) | N/A | +/- 0.5 µm | ||||
Tip-Tilt range | +/- 2.5°, manually actuated | +/- 2.5°, manually actuated | ||||
Load capacity | 0.9 kg | 10.0 kg | ||||
General specifications | ||||||
Power | 100 VAC… 240 VAC ±10%, 50/60 Hz 500 VA (typical) | |||||
Environmental conditions | Operating temperature: +18 °C … +30 °C (64.4 °F … 86 °C); | |||||
Compliance with standards | ||||||
Electrical safety | Norm1: IEC/EN 61010-1:2011-07 | Norm2: IEC/EN 61326-1:2013-07 | ||||
Emission: FCC Class A, IEC/EN 61000-3-2 and 61000-3-3 | ||||||
Immunity: IEC/EN 61000-4-2 to 61000-4-6 and IEC/EN 61000-4-11 | ||||||
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