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详细介绍
ATLEX-500-L/ATLEX-1000-L準分子雷射特點：
- TMC (Total-Metal-Ceramic) Vessel
- Corona Preionization
- Solid state switch
- Extended Dynamic & Static Gas-Lifetime (Several Months)
- Laser Head Volume 6 l
- Air Cooled / Optional Liquid Cooled
- RS-485, RS232, USB and fiber optic Interface for system integration
- Flushable optics holder
- Integrated 4-Valve System for Easy Gas Handling
- Meets European CE-standard, RoHS compliant
- Modular Design / Service Friendly
ATLEX-500-L/ATLEX-1000-L Specifications | |||
Gas Medium | ArF | KrF | Units |
Wavelength | 193 | 248 | nm |
High Voltage Switching Technique | Solid State Switch | ||
Max. Pulse Energy 1 | 10 | 15 | mJ |
Max. Average Power | 4.0 / 8.0 | 6.5 / 10.0 | W |
Max. Rep Rate | 500 / 1000 | Hz | |
Pulse Duration 2 | 5 – 8 | ns | |
Beam Dimensions 2 (V x H) | 6 x 4 | mm | |
Beam Divergence 2 (V x H) | 2 x 1 | mrad | |
Energy Stability (standard deviation) | <> | % | |
Dimensions (LxWxH) click here for details | 600 x 415 x 567 | mm | |
Weight | 70 | kg | |
Cooling | Cooling Air / Optional Liquid | ||
Power requirement | 230 VAC / 10 A / 1 Phase / 50-60 Hz | ||
- Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
- Typical value, FWHM
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