滚针电动缸是一种直线运动电动缸，采用艾塞路的滚针式导柱“精密滚针导柱”。
精密滚针导柱采用滚针作为滚动体，实现了高精度的直线性。因此，滚针电动缸是一种具有3个“1μm”的高精度、高刚性直线运动电动缸。
Million Actuator is a linear actuator that ISEL original roller type guide “Million Guide” is equipped inside. The “Million Guide” adopts needle rollers as rolling elements, and obtains the high precision linear travelling. Million Actuator holds the accuracy of three kinds of“1 micron”with high precision and high rigidity.
- 步进曝光机等各种光学设备的透镜和反射镜 移动、微小角度调整
- 对准台 X・Y・θ轴调整
- 相机、感应器位置调整
- Lens and mirror movement, minute angle adjustment of optical instruments like the stepper etc
- X/Y/θaxis adjustment of the alignment stage
- Positioning adjustment of the camera and sensor
- 显微镜、望远镜的透镜和反射镜调整
- 工作台定位
- 半导体、液晶制造装置
- 各种自动设备、试验装置等
- Lens and mirror adjustment of the microscope/ telescope
- Table positioning
- Manufacturing equipment of the semiconductor and liquid crystal
- Automatic machine and test equipment etc.
采用高精度的宽幅滚针，刚性比原来的滚珠类型提高了10倍以上。
High precision wide roller realizes over 10 times rigidity compared to the conventional ball type.
※1根据使用条件数值可能会有所不同。 ※1 Values may vary by the applications/conditions.
使用高精度的宽幅型的滚针、保持刚性的同时成功实现了低负荷。 因此滚动阻力被抑制到极限，达到了1μm进给精度。
利用这个高进给精度、在曝光机的镜头 · 镜片 · 平台的高精度定位等方面精密滚针导柱被广泛使用。
ISEL has succeeded in low preload with keeping rigidity by using high precision wide rollers. Million Guide has achieved 1 micron feed accuracy by minimizing the rolling resistance to the limit. For its high feed accuracy, Million Guide is adopted for high precision positioning of the mirror, lens and table of the exposure machine.
滚珠之间相互接触、碰撞而产生的摩擦，造成磨损、脏污、 发热等。另外，循环时负荷的加压、减压反复发生。非常容 易造成振动。
Ball contact/ collision makes friction, leading to wear, dust and heat emission. The preload off and on are repeated at the ball circulation, and it makes one of major vibration factors.
滚针之间相互不接触,不会发生转动体的接触、碰撞、摩擦。 另外，因为是非循环、低负荷，不会造成加压时冲击、振动也 减少。能够实现顺畅、微小的送给。
Rollers do not contact each other, and no contact, collision and friction occurs to rolling elements. No circulation and low preload structure makes less entry impact and vibration, and is smooth and ideal for minute feeding.
和滚珠类型相比，滚针导柱到达1/20 以下的低振动! 对于微小进给量最合适!
Dynamic accuracy ensured by low vibration under 1/20 compared to that of ball type.
将滚动阻力控制到极限、把0.1μm为1单位的微小进给量变成可能，实现了的响应速度。
Million Guide holds excellent tracking ability to enable minute feeding of 0.1 micron unit by minimizing the rolling resistance to the limit.
实现了高刚性、低振动的滚针导柱具有良好直线性、特别是往复运动精度比原来提高3倍 以上。利用这个特性、应用于微细的PCB基板开孔、半导体的组装等,在精密半导体领域 被广泛使用。
Million Guide realizes excellent linear travelling, with features of high rigidity and low vibration. Million Guide repeatability, in particular, is over 3 times as accurate as that of conventional one. For its advantage, Million Guide is widely adopted in the field of precision semiconductor, like minute drilling on PCB and semiconductor mounting etc.
振动大、刚性低的滚珠导柱的话，位置精度偏差大不稳定。滚针气缸的话，振动小并且到达很好的往复运动精度!
Affected by vibration, low-rigidity ball type has larger variation in positional accuracy. Million Actuator realizes excellent repeatability for its low vibration feature.
高精度滚针导柱和滚珠丝杠的配套组合，滚针气缸的重复定位精度实现了X·Y·Z全方向±1.0μm!
Combination of high precision Million Guide and ball screw makes the repetitive positioning accuracy of Million Actuator within ± 1.0μm in X/Y/Z directions.
- 上述规格如有变更，恕不另行通知。
- The above specifications are subject to change without advanced notice.
GMA2010 Motor Type
| D |
| 15 |
| 16 |
GMA2815 Motor Type
| L |
| 20 |
| 15 |
GMA4220 Motor Type
| D |
| φ5 |
| φ6 |
GMA6025 Motor Type
| d | D | P |
| φ6.35 | φ38.1 | 47.14 |
| φ10 | φ36 | 50 |
| 名称Product name | 滚针电动缸 Million Actuator | ||||
|---|---|---|---|---|---|
| 型号 Type | GMA2010 | GMA2815 | GMA4220 | GMA6025 | |
| 安装角落 Installation width | 20×20mm | 28×28mm | 42×42mm | 60×60mm | |
| 有效行程※3 Effective stroke | 10mm | 15mm | 20mm | 25mm | |
轴方向推力※1 Axial thrust | 额定 Rating | 30N | 50N | 150N | 300N |
瞬间 Instantaneous maximum | 60N | 100N | 250N | 500N | |
送给速度※1 Feed speed | 额定 Rating | 10mm/sec(电机 600min-1 时) 10mm/sec(In case of Motor 600min-1) | 15mm/sec (电机 450min-1 时) 15mm/sec(In case of Motor 450min-1) | 20mm/sec (电机 400min-1 时) 20mm/sec(In case of Motor 400min-1) | |
瞬间 Instantaneous maximum | 50mm/sec(电机 3000min-1 时) 50mm/sec(In case of Motor 3000min-1) | 100mm/sec(电机 3000min-1 时) 100mm/sec(In case of Motor 3000min-1) | 100mm/sec(电机 2000min-1 时) 100mm/sec(In case of Motor 2000min-1) | ||
| 送给丝杠 Feed screw | 精密研磨滚珠丝杠 Precision ground ball screw | ||||
| 丝杠导线 Screw lead | 1mm | 2mm | 3mm | ||
重复定位精度 Repetitive positioning accuracy | ±1.0μm | ||||
| 空转 Lost motion | 3.0μm | ||||
| 分辨率 Resolution | 0.1μm/pls※2 | 0.1μm/pls※2 | 0.2μm/pls※2 | 0.3μm/pls※2 | |
搭载标准电机(参考) Standard motor(Reference) | (株)三明步进电机 Si servo(附带编码器) Stepping motor Si Servo (with encoder) made by Sanmei Co., Ltd. | ||||
| TS3692N61S02 | TS3641N61S02 | TS3617N370S04 | TS3653N324S04 | ||
| 电源电压 Power supply voltage | DC24V±10% | ||||
| 感应器 Sensor | 无 | 磁性接近感应器 附带2个(ASA电子工业(株)制 ACH02RW) Magnetic proximity switches 2 pcs (ACH02RW made by ASA Electronics Industry) | |||
| 重量 | 约0.25kg Approx.0.25kg | 约0.4kg Approx.0.4kg | 约1.3kg Approx.1.3kg | 约3.7kg Approx.3.7kg | |
| 使用温度范围 Operating temperature range | 0~50°C | ||||
- ※ 搭载电机使用时的注意事项参考:
- ※1 请不要长时在推力或速度下使用。可能会造成滚珠丝杠的寿命显著下降，推力或速度请在瞬时使用。
- ※2 电机编码器的分辨率设定为10000pls/rev时的值。
- ※3 请在装置侧安装挡块等，确保其动作时不会超过有效行程。
- ※ 上面数据是带有标准电机时的数据。
- ※ 重量中包含标准电机的重量(不含电缆重量)。
- ※ 上面重复定位精度数据要求丝杠的温度是固定的。(不考虑周围・丝杠温度变化带来的影响 )
- ※Precautions when using the equipped motors:
- ※1 Do not operate under the maximum thrust/ speed at all times, or the ball screw life could be significantly shortened; The maximum thrust/ speed operation should be limited to instantaneous use.
- ※2 Values at resolution set of motor encoder“10000pls/rev”
- ※3 Install a stopper etc. on the device side so that it does not run beyond its effective stroke.
- ※ It is the data with the standard motor equipped.
- ※ The weight includes the standard motor. (Cable weight is excluded.)
- ※ The repetitive positioning accuracy is limited under the condition where the actuator temperature is constant. (The influence is not considered by environmental/ actuator temperature change.)
