详细介绍
具体产品适用规格参数:
1、晶圆环,200只,每筐20圈,4.5小时
2、晶片盒- < 2每天,每筐2盒,1.5小时。(Wafer Cassette - < 2 per day, 2 cassettes per basket, 1.5 hours.)
3、杂志社,每天100件,每筐8份杂志,每天5小时。(Magazine – 100 pcs per day, 8 magazines per basket, 5 hours per day.)
4、托盘(JEDEC)–每天50盘,30盘,每筐,每天2小时zui大。(Trays (JEDEC) – 50 trays per day, 30 trays per basket, 2 hours max. per day.)